Celiktas, CSelvi, SYegin, G2024-07-182024-07-180969-806Xhttp://akademikarsiv.cbu.edu.tr:4000/handle/123456789/7766We have examined the performance of a modified beta-ray spectrometer using a pulse shape analyzer/timing single channel analyzer and related electronics, thereby preserving the low energy electron tail in measurement of the scattered electron spectra from an n-type Si wafer target. Comparison of measurements with the scattering spectra calculated by the Monte Carlo program EGS4 indicates good agreement across a significant part of the spectrum, an exception being for the energy region 30-100 keV. Re-evaluation of existing scattering cross-sections would be useful, as would possible geometrical effects of the scattering arrangement used herein. Present efforts seek to contribute to the evaluation of electron scattering cross-sections and improvement in theoretical models. (C) 2004 Elsevier Ltd. All rights reserved.EnglishPULSE-SHAPE-DISCRIMINATIONELASTIC ELECTRON BACKSCATTERINGRECOIL DETECTIONPILE-UPSURFACESREJECTIONPARTICLESArticle